Plasma Processing Induced Charging Damage (PID) Discussion Group
| Title: | Plasma Processing Induced Charging Damage (PID) Discussion Group |
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| Authors: | Martin, Andreas |
| Source: | 2022 IEEE International Integrated Reliability Workshop (IIRW) Integrated Reliability Workshop (IIRW), 2022 IEEE International. :1-11 Oct, 2022 |
| Relation: | 2022 IEEE International Integrated Reliability Workshop (IIRW) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781665453684 |
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| ISSN: | 23748036 |
| DOI: | 10.1109/IIRW56459.2022.10032740 |
| Published in: | 2022 IEEE International Integrated Reliability Workshop (IIRW), Integrated Reliability Workshop (IIRW), 2022 IEEE International |