Bibliographic Details
| Title: |
A method of magnetic field measurement in a scanning electron microscope using a microcantilever magnetometer |
| Authors: |
Orłowska Karolina, Mognaschi Maria E., Kwoka Krzysztof, Piasecki Tomasz, Kunicki Piotr, Sierakowski Andrzej, Majstrzyk Wojciech, Podgórni Arkadiusz, Pruchnik Bartosz, di Barba Paolo, Gotszalk Teodor |
| Source: |
Metrology and Measurement Systems, Vol 27, Iss 1, Pp 141-149 (2020) |
| Publisher Information: |
Polish Academy of Sciences, 2020. |
| Publication Year: |
2020 |
| Collection: |
LCC:Technology |
| Subject Terms: |
scanning electron microscope, magnetometry, microcantilever, Technology |
| More Details: |
Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2, 3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro- and nano electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification. |
| Document Type: |
article |
| File Description: |
electronic resource |
| Language: |
English |
| ISSN: |
2300-1941 |
| Relation: |
http://journals.pan.pl/dlibra/publication/131710/edition/115041/content; https://doaj.org/toc/2300-1941 |
| DOI: |
10.24425/mms.2020.131710 |
| Access URL: |
https://doaj.org/article/bbf422e593e44c8595700c477141834f |
| Accession Number: |
edsdoj.bbf422e593e44c8595700c477141834f |
| Database: |
Directory of Open Access Journals |
