High‐performance piezoresistive sensors based on transfer‐free large‐area PdSe2 films for human motion and health care monitoring

Bibliographic Details
Title: High‐performance piezoresistive sensors based on transfer‐free large‐area PdSe2 films for human motion and health care monitoring
Authors: Rui Zhang, Jie Lin, Tao He, Jiafang Wu, Zhuojun Yang, Liwen Liu, Shaofeng Wen, Yimin Gong, Haifeng Lv, Jing Zhang, Yi Yin, Fangjia Li, Changyong Lan, Chun Li
Source: InfoMat, Vol 6, Iss 1, Pp n/a-n/a (2024)
Publisher Information: Wiley, 2024.
Publication Year: 2024
Collection: LCC:Materials of engineering and construction. Mechanics of materials
LCC:Information technology
Subject Terms: layered crystal, PdSe2, piezoresistive effect, strain sensor, Materials of engineering and construction. Mechanics of materials, TA401-492, Information technology, T58.5-58.64
More Details: Abstract Two‐dimensional transition metal dichalcogenides (TMDs) are needed in high‐performance piezoresistive sensors due to their strong strain‐induced bandgap modification and thereby large gauge factors. However, integrating a conventional high‐temperature chemical vapor deposition (CVD)‐grown TMD with a flexible substrate necessitates a transfer process that inevitably degrades the sensing properties of the TMDs and increases the overall fabrication complexity. We present a high‐performance piezoresistive strain sensor that employs large‐area PdSe2 films grown directly on polyimide (PI) substrates via plasma‐assisted selenization of a sputtered Pd film. The reliable strain transfer from the substrate to the PdSe2 film ensures an outstanding strain‐sensing capability of the sensor. Specifically, the sensors have a gauge factor of up to −315 ± 2.1, a response time under 25 ms, a detection limit of 8 × 10−6, and an exceptional stability of over 104 loading–unloading cycles. By attaching the sensors to the skin surface, we demonstrate their application for measuring physiological parameters in health care monitoring, including motion, voice, and arterial pulse vibration. Furthermore, using the PdSe2 film sensor combined with deep learning technology, we achieved intelligent recognition of artery temperature from arterial pulse signals with only a 2% difference between predicted and actual temperatures. The excellent sensing performance, together with the advantages of low‐temperature fabrication and simple device structure, make the PdSe2 film sensor promising for wearable electronics and health care sensing systems.
Document Type: article
File Description: electronic resource
Language: English
ISSN: 2567-3165
Relation: https://doaj.org/toc/2567-3165
DOI: 10.1002/inf2.12484
Access URL: https://doaj.org/article/8dca1f108acb43a7a2fd026c90ff307c
Accession Number: edsdoj.8dca1f108acb43a7a2fd026c90ff307c
Database: Directory of Open Access Journals
More Details
ISSN:25673165
DOI:10.1002/inf2.12484
Published in:InfoMat
Language:English