Academic Journal
Novel fabrication techniques for ultra-thin silicon based flexible electronics
| Title: | Novel fabrication techniques for ultra-thin silicon based flexible electronics |
|---|---|
| Authors: | Ju Young Lee, Jeong Eun Ju, Chanwoo Lee, Sang Min Won, Ki Jun Yu |
| Source: | International Journal of Extreme Manufacturing, Vol 6, Iss 4, p 042005 (2024) |
| Publisher Information: | IOP Publishing, 2024. |
| Publication Year: | 2024 |
| Collection: | LCC:Materials of engineering and construction. Mechanics of materials LCC:Industrial engineering. Management engineering LCC:Physics |
| Subject Terms: | flexible electronics, silicon fabrication technique, top-down approach, bottom-up approach, Materials of engineering and construction. Mechanics of materials, TA401-492, Industrial engineering. Management engineering, T55.4-60.8, Physics, QC1-999 |
| More Details: | Flexible electronics offer a multitude of advantages, such as flexibility, lightweight property, portability, and high durability. These unique properties allow for seamless applications to curved and soft surfaces, leading to extensive utilization across a wide range of fields in consumer electronics. These applications, for example, span integrated circuits, solar cells, batteries, wearable devices, bio-implants, soft robotics, and biomimetic applications. Recently, flexible electronic devices have been developed using a variety of materials such as organic, carbon-based, and inorganic semiconducting materials. Silicon (Si) owing to its mature fabrication process, excellent electrical, optical, thermal properties, and cost efficiency, remains a compelling material choice for flexible electronics. Consequently, the research on ultra-thin Si in the context of flexible electronics is studied rigorously nowadays. The thinning of Si is crucially important for flexible electronics as it reduces its bending stiffness and the resultant bending strain, thereby enhancing flexibility while preserving its exceptional properties. This review provides a comprehensive overview of the recent efforts in the fabrication techniques for forming ultra-thin Si using top-down and bottom-up approaches and explores their utilization in flexible electronics and their applications. |
| Document Type: | article |
| File Description: | electronic resource |
| Language: | English |
| ISSN: | 2631-7990 |
| Relation: | https://doaj.org/toc/2631-7990 |
| DOI: | 10.1088/2631-7990/ad492e |
| Access URL: | https://doaj.org/article/1e028845359e4dae9f5a50eb3562dd31 |
| Accession Number: | edsdoj.1e028845359e4dae9f5a50eb3562dd31 |
| Database: | Directory of Open Access Journals |
| ISSN: | 26317990 |
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| DOI: | 10.1088/2631-7990/ad492e |
| Published in: | International Journal of Extreme Manufacturing |
| Language: | English |