| Title: |
Optimization of an Anode Membrane with a Transmission-Type Target in a System of Soft X-Ray Sources for X-Ray Nanolithography |
| Authors: |
Glagolev, P. Yu., Demin, G. D., Oreshkin, G. I., Chkhalo, N. I., Djuzhev, N. A. |
| Source: |
Technical physics. 65(11):1709-1716 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100187112492.0x000001&indx=1&recIds=ETOCvdc_100187112492.0x000001 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
