| Title: |
Experimental demonstration of multifrequency impedance matching for tailored voltage waveform plasmas |
| Authors: |
Wang, Junkang, Dine, Sebastien, Booth, Jean-Paul, Johnson, Erik V. |
| Source: |
Journal of vacuum science & technology.A.Vacuum, surfaces, and films. 37(2) |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCvdc_100090640621.0x000001&indx=1&recIds=ETOCvdc_100090640621.0x000001 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
