Effect of Line-Edge-Roughness on Wiggling

Bibliographic Details
Title:	Effect of Line-Edge-Roughness on Wiggling
Authors:	Kofuji, N., Negishi, N., Ishimura, H., Nishida, T., Kobayashi, H.
Source:	PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS. :177-180
Availability:	http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN350156419&indx=1&recIds=ETOCRN350156419
Database:	British Library Document Supply Centre Inside Serials & Conference Proceedings

More Details
Published in:	PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS
Language:	English