Systematic study of shallow junction formation on germanium substrates

Bibliographic Details
Title: Systematic study of shallow junction formation on germanium substrates
Authors: Hellings, G., Rosseel, E., Clarysse, T., Petersen, D. H., Hansen, O., Nielsen, P. F., Simoen, E., Eneman, G., De Jaeger, B., Hoffmann, T.
Source: MICROELECTRONIC ENGINEERING. 88(4):347-350
Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN312223191&indx=1&recIds=ETOCRN312223191
Database: British Library Document Supply Centre Inside Serials & Conference Proceedings
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ISSN:01679317
Published in:MICROELECTRONIC ENGINEERING
Language:English