Bibliographic Details
| Title: |
Systematic study of shallow junction formation on germanium substrates |
| Authors: |
Hellings, G., Rosseel, E., Clarysse, T., Petersen, D. H., Hansen, O., Nielsen, P. F., Simoen, E., Eneman, G., De Jaeger, B., Hoffmann, T. |
| Source: |
MICROELECTRONIC ENGINEERING. 88(4):347-350 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN312223191&indx=1&recIds=ETOCRN312223191 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
