Optimization of FIB milling for rapid NEMS prototyping
| Title: | Optimization of FIB milling for rapid NEMS prototyping |
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| Authors: | Malm, B., Petersen, D. H., Lei, A., Booth, T. J., Homann, L. V., Boggild, P. |
| Source: | MICROELECTRONIC ENGINEERING. 88(8):2671-2674 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN293994624&indx=1&recIds=ETOCRN293994624 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 01679317 |
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| Published in: | MICROELECTRONIC ENGINEERING |
| Language: | English |