Title: |
Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns |
Authors: |
Ding, Y., Ro, H. W., Alvine, K. J., Okerberg, B. C., Zhou, J., Douglas, J. F., Karim, A., Soles, C. L. |
Source: |
ADVANCED FUNCTIONAL MATERIALS. 18(12):1854-1862 |
Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN231960168&indx=1&recIds=ETOCRN231960168 |
Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |