Nano-fluctuation of Pneumatic Servo Bearing Actuator for Ultraprecise Positioning

Bibliographic Details
Title: Nano-fluctuation of Pneumatic Servo Bearing Actuator for Ultraprecise Positioning
Authors: Kitagawa, T., Hirayama, T., Matsuoka, T., Kadotani, M., Danjyo, H., Sasaki, K., Yabe, H.
Source: SCIENCE AND ENGINEERING REVIEW- DOSHISHA UNIVERSITY. 48(4):234-240
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