Bibliographic Details
Title: |
Nano-fluctuation of Pneumatic Servo Bearing Actuator for Ultraprecise Positioning |
Authors: |
Kitagawa, T., Hirayama, T., Matsuoka, T., Kadotani, M., Danjyo, H., Sasaki, K., Yabe, H. |
Source: |
SCIENCE AND ENGINEERING REVIEW- DOSHISHA UNIVERSITY. 48(4):234-240 |
Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN226657986&indx=1&recIds=ETOCRN226657986 |
Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |