Wafer Level Thin Film Encapsulation for RF MEMS
| Title: | Wafer Level Thin Film Encapsulation for RF MEMS |
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| Authors: | Gillot, C., Pornin, J.L., Parat, G., Jacquet, F., Lagoutte, E., Sillon, N., Poupon, G., Ancey, P. |
| Source: | ADVANCING MICROELECTRONICS. 35(2):14-19 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN224989206&indx=1&recIds=ETOCRN224989206 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| Published in: | ADVANCING MICROELECTRONICS |
|---|---|
| Language: | English |