Chemical free cleaning using excimer lasers [2703-35]
| Title: | Chemical free cleaning using excimer lasers [2703-35] Lasers as Tools for Manufacturing of Durable Goods and Microelectronics |
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| Authors: | Lizotte, T. E., O'Keeffe, T. R. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. (2703):279-287 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCRN010491320&indx=1&recIds=ETOCRN010491320 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 03610748 |
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| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |