Detection and evaluation of surface defect for large-size grating
| Title: | Detection and evaluation of surface defect for large-size grating Holography, Diffractive Optics, and Applications XII |
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| Authors: | Li, Xingxue, Zhou, Bin, Xu, Mengqing, Chen, Yuda, Wang, Yihan, Wang, Jin, Zhou, Changhe |
| Source: | Proceedings of SPIE, the International Society for Optical Engineering. 12318:123180X-123180X-5 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN900053779&indx=1&recIds=ETOCCN900053779 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9781510657021 1510657029 |
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| ISSN: | 0277786X |
| Published in: | Proceedings of SPIE, the International Society for Optical Engineering |
| Language: | English |