Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration and new directions
| Title: | Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration and new directions Optical Metrology and Inspection for Industrial Applications VI |
|---|---|
| Authors: | McBride, J. W., Cross, K. J., Bull, T. G. |
| Source: | Proceedings of SPIE, the International Society for Optical Engineering. 11189:111890S-111890S-8 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN900015960&indx=1&recIds=ETOCCN900015960 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9781510630956 1510630953 |
|---|---|
| ISSN: | 0277786X |
| Published in: | Proceedings of SPIE, the International Society for Optical Engineering |
| Language: | English |