(Invited) MEMS Capping By Anodic Bonding of Evaporated Glass Thin Films
| Title: | (Invited) MEMS Capping By Anodic Bonding of Evaporated Glass Thin Films Pacific Rim Meeting on Electrochemical and Solid-State Science 2016 |
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| Authors: | Hansen, Ulli, Maus, Simon, Gyenge, Oliver, Hu, Xiaodong |
| Source: | Meeting abstracts / Electrochemical Society. 230(3):2100-2100 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN602105260&indx=1&recIds=ETOCCN602105260 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 01604619 |
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| Published in: | Meeting abstracts / Electrochemical Society |
| Language: | English |