Bibliographic Details
| Title: |
Contact Hole Shrink And Multiplication By Directed Self-Assembly Of Block Copolymers: From Material To Integration
Directed self-assembly for nanopatterning (Symposium) |
| Authors: |
Tiron, R., Chevalier, X., Gharbi, A., Argoud, M., Pimenta-Barros, P., Maret, M., Gergaud, P., Terlier, T., Barnes, J.-P., Navarro, C. |
| Source: |
Materials Research Society symposia proceedings. 1750:1-11 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN600461162&indx=1&recIds=ETOCCN600461162 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
