Etch challenges for DSA implementation in CMOS via patterning [9054-15]
| Title: | Etch challenges for DSA implementation in CMOS via patterning [9054-15] Advanced etch technology for nanopatterning |
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| Authors: | Barros, P.P., Barnola, S., Gharbi, A., Argoud, M., Servin, I., Tiron, R., Chevalier, X., Navarro, C., Nicolet, C., Lapeyre, C. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 9054:9054 0G-9054 0G |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN087326860&indx=1&recIds=ETOCCN087326860 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780819499776 0819499773 |
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| ISSN: | 0277786X |
| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |