n-LDD Ultra-shallow Extension Formation Using Cold and Carbon Ion Implantation
| Title: | n-LDD Ultra-shallow Extension Formation Using Cold and Carbon Ion Implantation Ion implantation technology |
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| Authors: | Kuo, P., Li, C.I., Lai, H.H., Liu, R., Chan, M., Yang, C.L., Wu, J.Y., Ameen, M., Rubin, L.M., Tien, E. |
| Source: | AIP CONFERENCE PROCEEDINGS. 1321:135-138 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN078934588&indx=1&recIds=ETOCCN078934588 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780735408760 0735408769 |
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| ISSN: | 0094243X |
| Published in: | AIP CONFERENCE PROCEEDINGS |
| Language: | English |