Sol-gel process to cast quartz glass microlens arrays
| Title: | Sol-gel process to cast quartz glass microlens arrays Micro- and nano-engineering; MNE'08 |
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| Authors: | Kreuzberger, T., Harnisch, A., Helgert, M., Erdmann, L., Brunner, R. |
| Source: | MICROELECTRONIC ENGINEERING. 86(4/6):1173-1175 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN072853970&indx=1&recIds=ETOCCN072853970 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 01679317 |
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| Published in: | MICROELECTRONIC ENGINEERING |
| Language: | English |