Thick Epitaxial Layers Growth by Chlorine Addition

Bibliographic Details
Title: Thick Epitaxial Layers Growth by Chlorine Addition
European Conference on Silicon Carbide and Related Materials
Authors: La Via, F., Izzo, G., Camarda, M., Abbondanza, G., Crippa, D.
Source: MATERIALS SCIENCE FORUM. 615-617:55-60
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Database: British Library Document Supply Centre Inside Serials & Conference Proceedings
More Details
ISSN:02555476
Published in:MATERIALS SCIENCE FORUM
Language:English