Bibliographic Details
| Title: |
On the analysis of the activation mechanisms of sub-melt laser anneals
Front-end junction and contact formation in future silicon/germanium based devices |
| Authors: |
Clarysse, T., Bogdanowicz, J., Goossens, J., Moussa, A., Rosseel, E., Vandervorst, W., Petersen, D. H., Lin, R., Nielsen, P. F., Hansen, O. |
| Source: |
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS. 154/155:24-30 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN071318951&indx=1&recIds=ETOCCN071318951 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
