Theoretical Monte Carlo Study of the Formation and Evolution of Defects in the Homoepitaxial Growth of SiC

Bibliographic Details
Title: Theoretical Monte Carlo Study of the Formation and Evolution of Defects in the Homoepitaxial Growth of SiC
International Conference on Silicon Carbide and Related Materials
Authors: Camarda, M., La Magna, A., Fiorenza, P., Izzo, G., La Via, F.
Source: MATERIALS SCIENCE FORUM. 600-603:135-138
Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN071193675&indx=1&recIds=ETOCCN071193675
Database: British Library Document Supply Centre Inside Serials & Conference Proceedings
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ISSN:02555476
Published in:MATERIALS SCIENCE FORUM
Language:English