Bibliographic Details
| Title: |
Dynamic stencil lithography on full wafer scale
Electronic, ion and photon beam technology and nanofabrication |
| Authors: |
Savu, V., van den Boogaart, M.A.F., Brugger, J., Arcamone, J., Sansa, M., Perez-Murano, F. |
| Source: |
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B MICROELECTRONICS AND NANOMETER STRUCTURES. 26(6):2054-2058 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN070994778&indx=1&recIds=ETOCCN070994778 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
