Drastic Activation of Dopant in Si Film Using ELA for High-Performance TFT

Bibliographic Details
Title: Drastic Activation of Dopant in Si Film Using ELA for High-Performance TFT
International display workshops; IDW '07
Authors: Noguchi, T., Kawai, K., Kinjo, E., Nakamura, R., Miyahira, T., Kakazu, J., Suzuki, T., Sato, M.
Source: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS. CONF 14:1885-1888
Availability: http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN067946606&indx=1&recIds=ETOCCN067946606
Database: British Library Document Supply Centre Inside Serials & Conference Proceedings