Bibliographic Details
| Title: |
Beyond SRP: Quantitative carrier profiling with M4PP
Si-based materials for advanced microelectronic devices : synthesis, defects and diffusion |
| Authors: |
Clarysse, T., Vandervorst, W., Lin, R., Petersen, D. H., Nielsen, P. F. |
| Source: |
NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B. 253(1/2):136-140 |
| Availability: |
http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN062532865&indx=1&recIds=ETOCCN062532865 |
| Database: |
British Library Document Supply Centre Inside Serials & Conference Proceedings |
