EUV multilayer optics
| Title: | EUV multilayer optics International conference on micro and nano engineering; MNE 2005 |
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| Authors: | Feigl, T., Yulin, S., Benoit, N., Kaiser, N. |
| Source: | MICROELECTRONIC ENGINEERING. 83(4/9):703-706 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN059627800&indx=1&recIds=ETOCCN059627800 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 01679317 |
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| Published in: | MICROELECTRONIC ENGINEERING |
| Language: | English |