S3P24 Control system for guiding deviations on the PTB nanometer comparator
Title: | S3P24 Control system for guiding deviations on the PTB nanometer comparator European Society for Precision Engineering and Nanotechnology |
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Authors: | Flugge, J., Koning, R., Bosse, H. |
Source: | PROCEEDINGS OF THE EUSPEN INTERNATIONAL CONFERENCE. CONF 5:233-236 |
Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN057135840&indx=1&recIds=ETOCCN057135840 |
Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
ISBN: | 9789299003503 9299003505 |
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Published in: | PROCEEDINGS OF THE EUSPEN INTERNATIONAL CONFERENCE |
Language: | English |