High-temperature multilayers [5751-151]
| Title: | High-temperature multilayers [5751-151] Emerging lithographic technologies IX |
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| Authors: | Yulin, S., Benoit, N., Feigl, T., Kaiser, N. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 5751(2):1155-1161 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN056134114&indx=1&recIds=ETOCCN056134114 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780819457318 0819457310 |
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| ISSN: | 0277786X |
| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |