Monolithically integrated micro flow sensor for lab-on-chip applications

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Title: Monolithically integrated micro flow sensor for lab-on-chip applications
Proceedings of the 30th international conference on micro and nano engineering
Authors: Schöler, L., Lange, B., Seibel, K., Schäfer, H., Walder, M., Friedrich, N., Ehrhardt, D., Schönfeld, F., Zech, G., Böhm, M.
Source: MICROELECTRONIC ENGINEERING. 78-79:164-170
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  Data: Monolithically integrated micro flow sensor for lab-on-chip applications<br />Proceedings of the 30th international conference on micro and nano engineering
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      – Text: English
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        PageCount: 7
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              Y: 2005
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