High-performance Cr/Sc multilayers for the soft x-ray range [5193-23]
| Title: | High-performance Cr/Sc multilayers for the soft x-ray range [5193-23] Advances in mirror technology for x-ray, EUV lithography, laser and other applications |
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| Authors: | Yulin, S. A., Schafers, F., Feigl, T., Kaiser, N. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 5193:172-176 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN051972142&indx=1&recIds=ETOCCN051972142 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780819450661 0819450669 |
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| ISSN: | 0277786X |
| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |