Line scale comparison Nano3 [5190-12]
| Title: | Line scale comparison Nano3 [5190-12] Recent developments in traceable dimensional measurements |
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| Authors: | Bosse, H., Hassler-Grohne, W., Flugge, J., Koning, R. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 5190:122-133 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN050830911&indx=1&recIds=ETOCCN050830911 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780819450630 0819450634 |
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| ISSN: | 0277786X |
| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |