Lossless compression techniques for maskless lithography data [4688-67]
| Title: | Lossless compression techniques for maskless lithography data [4688-67] Emerging lithographic technologies |
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| Authors: | Dai, V., Zakhor, A. |
| Source: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING. 4688(PT 2):583-594 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN044798840&indx=1&recIds=ETOCCN044798840 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISBN: | 9780819444349 0819444340 |
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| ISSN: | 0277786X |
| Published in: | PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING |
| Language: | English |