Analysis of Atomic Force Microscopy Images of Crystal Originated 'Particles' on (100) Silicon Wafer through its Side Wall Angle Measurement
| Title: | Analysis of Atomic Force Microscopy Images of Crystal Originated 'Particles' on (100) Silicon Wafer through its Side Wall Angle Measurement Asia Pacific physics conference |
|---|---|
| Authors: | Lee, W. P., Yow, H. K., Tou, T. Y. |
| Source: | PROCEEDINGS OF THE ASIA PACIFIC PHYSICS CONFERENCE. :633-637 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN042497691&indx=1&recIds=ETOCCN042497691 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| Published in: | PROCEEDINGS OF THE ASIA PACIFIC PHYSICS CONFERENCE |
|---|---|
| Language: | English |