Angular dependences of surface composition, sputtering and ripple formation on silicon under N~2^+ ion bombardment
| Title: | Angular dependences of surface composition, sputtering and ripple formation on silicon under N~2^+ ion bombardment Ion-surface interaction |
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| Authors: | Bachurin, V. I., Lepshin, P. A., Smirnov, V. K. |
| Source: | VACUUM -LONDON THEN OXFORD- PERGAMON-. 56(NO 4):241-246 |
| Availability: | http://explore.bl.uk/primo_library/libweb/action/display.do?tabs=detailsTab&gathStatTab=true&ct=display&fn=search&doc=ETOCCN034627319&indx=1&recIds=ETOCCN034627319 |
| Database: | British Library Document Supply Centre Inside Serials & Conference Proceedings |
| ISSN: | 0042207X |
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| Published in: | VACUUM -LONDON THEN OXFORD- PERGAMON- |
| Language: | English |