| Title: |
Near 6 GHz Sezawa Mode Surface Acoustic Wave Resonators using AlScN on SiC |
| Authors: |
Du, Xingyu, Sharma, Nishant, Tang, Zichen, Leblanc, Chloe, Jariwala, Deep, Olsson III, Roy H. |
| Publication Year: |
2023 |
| Collection: |
Physics (Other) |
| Subject Terms: |
Physics - Applied Physics |
| More Details: |
Surface Acoustic Wave (SAW) devices featuring Aluminum Scandium Nitride (AlScN) on a 4H-Silicon Carbide (SiC) substrate, offer a unique blend of high sound velocity, low thermal resistance, substantial piezoelectric response, simplified fabrication, as well as suitability for high-temperature and harsh environment operation. This study presents high-frequency SAW resonators employing AlScN thin films on SiC substrates, utilizing the second SAW mode (referred to as the Sezawa mode). The resonators achieve remarkable performance, boasting a K2 value of 5.5% and a maximum Q-factor (Qmax) of 1048 at 4.7 GHz, outperforming previous benchmarks. Additionally, a SAW resonator with a 960 nm wavelength attains 5.9 GHz frequency with record K2 (4.0%) and Qmax (887). Our study underscores the potential of the AlScN on SiC platform for advanced radio-frequency applications.
Comment: 19 pages, 5 figures in main text and 3 figures in supplementary |
| Document Type: |
Working Paper |
| Access URL: |
http://arxiv.org/abs/2311.08694 |
| Accession Number: |
edsarx.2311.08694 |
| Database: |
arXiv |
