Immersion white light scanning interferometry using elastic polymer path length compensation
| Title: | Immersion white light scanning interferometry using elastic polymer path length compensation |
|---|---|
| Authors: | Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Mukhtar, Husneni, Montgomery, Paul, Anstotz, Freddy, Barillon, Rémi, Rubin, Anne |
| Source: | Proceedings of SPIE; May 2018, Vol. 10678 Issue: 1 p1067816-1067816-9 |
| Database: | Supplemental Index |
| ISSN: | 0277786X |
|---|---|
| DOI: | 10.1117/12.2315474 |
| Published in: | Proceedings of SPIE |
| Language: | English |