| Title: |
Novel high sensitivity EUV photoresist for sub-7nm node |
| Authors: |
Hohle, Christoph K., Younkin, Todd R., Nagai, Tomoki, Nakagawa, Hisashi, Naruoka, Takehiko, Tagawa, Seiichi, Oshima, Akihiro, Nagahara, Seiji, Shiraishi, Gosuke, Yoshihara, Kosuke, Terashita, Yuichi, Minekawa, Yukie, Buitrago, Elizabeth, Ekinci, Yasin, Yildirim, Oktay, Meeuwissen, Marieke, Hoefnagels, Rik, Rispens, Gijsbert, Verspaget, Coen, Maas, Raymond |
| Source: |
Proceedings of SPIE; March 2016, Vol. 9779 Issue: 1 p977908-977908-7 |
| Database: |
Supplemental Index |
