Bibliographic Details
| Title: |
Towards electrical testable SOI devices using Directed Self-Assembly for fin formation |
| Authors: |
Resnick, Douglas J., Bencher, Christopher, Liu, Chi-Chun, Estrada-Raygoza, Cristina, He, Hong, Cicoria, Michael, Rastogi, Vinayak, Mohanty, Nihar, Tsai, Hsinyu, Schepis, Anthony, Lai, Kafai, Chao, Robin, Liu, Derrick, Guillorn, Michael, Cantone, Jason, Mignot, Sylvie, Kim, Ryoung-Han, Cheng, Joy, Tjio, Melia, Ko, Akiteru, Hetzer, David, Somervell, Mark, Colburn, Matthew |
| Source: |
Proceedings of SPIE; March 2014, Vol. 9049 Issue: 1 p904909-904909-12 |
| Database: |
Supplemental Index |
