Advanced refractory-metal and process technology for the fabrication of x-ray masks.
| Title: | Advanced refractory-metal and process technology for the fabrication of x-ray masks. |
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| Authors: | Brooks, Cameron J., Racette, Kenneth C., Lercel, Michael J., Powers, Lynn A., Benoit, Douglas E. |
| Source: | Proceedings of SPIE; Nov1999, Issue 1, p14-23, 10p |
| Database: | Complementary Index |
| ISSN: | 0277786X |
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| DOI: | 10.1117/12.351107 |
| Published in: | Proceedings of SPIE |
| Language: | English |