Assessment of silicon carbide x-ray mask overlay performance in the IBM Advanced Lithography Facility x-ray stepper.
| Title: | Assessment of silicon carbide x-ray mask overlay performance in the IBM Advanced Lithography Facility x-ray stepper. |
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| Authors: | Kimmel, Kurt R., Chen, Alek C., Powers, Lynn A., Vampatella, Ben R. |
| Source: | Proceedings of SPIE; Nov1995, Issue 1, p383-390, 8p |
| Database: | Complementary Index |
| ISSN: | 0277786X |
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| DOI: | 10.1117/12.209176 |
| Published in: | Proceedings of SPIE |
| Language: | English |