Evaluation of Cu surface diffusion on different metal liner materials for Cu reflow applications.
| Title: | Evaluation of Cu surface diffusion on different metal liner materials for Cu reflow applications. |
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| Authors: | van der Straten, O., Wangoh, L. W. |
| Source: | Journal of Materials Research; Oct2024, Vol. 39 Issue 20, p2811-2819, 9p |
| Database: | Complementary Index |
| ISSN: | 08842914 |
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| DOI: | 10.1557/s43578-024-01427-0 |
| Published in: | Journal of Materials Research |
| Language: | English |