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Microgroove machining characteristics of Si3N4 ceramics by dual-beam coupled nanosecond laser.

Bibliographic Details
Title: Microgroove machining characteristics of Si3N4 ceramics by dual-beam coupled nanosecond laser.
Authors: Zhang, Xuanhua, Chen, Xiaoxiao, Chen, Xianyou, Zhang, Wenwu, Huang, Lirong
Source: Proceedings of SPIE; 4/14/2023, Vol. 12501, p1250108-1250108, 1p
Database: Complementary Index
More Details
ISSN:0277786X
DOI:10.1117/12.2648603
Published in:Proceedings of SPIE
Language:English