Bibliographic Details
| Title: |
Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas. |
| Authors: |
Li, Jie, Kim, Yongjae, Han, Seunghun, Niu, Jingjie, Chae, Heeyeop |
| Source: |
Plasma Chemistry & Plasma Processing; Jul2022, Vol. 42 Issue 4, p989-1002, 14p |
| Subject Terms: |
INDUCTIVELY coupled plasma mass spectrometry, MASS spectrometry, FLUORINE, QUANTITATIVE research |
| Abstract: |
In this work, we proposed a simple method to estimate the F radical density in CF4 and CF4/O2 plasmas using mass spectrometry. CF4 and CF4/O2 plasmas were generated using various power and gas ratio in an inductively coupled plasma reactor. The origins of ion signals in mass spectrum were approximated based on the species densities, ionization cross sections and extraction efficiencies in the CF4 and CF4/O2 plasmas. It was determined that majority of the CF3+ ion signals originated from the ionization of CF4, whereas the F+ ion signals originated from two main species of F radicals and CF4 molecules. The relative F radical densities were determined by subtracting the F+ signals derived from the CF4 molecules from the total F+ signals measured by mass spectrometry, where the F+ signals derived from the CF4 molecules were estimated from CF3+ signals. We found that more than 90% and 20–60% of the F+ ion signals were derived from the CF4 molecules in the CF4 and CF4/O2 plasmas, respectively, under our experimental conditions. The F radical densities were also estimated using optical actinometry, and the values determined by mass spectrometry and optical actinometry exhibited a linear relationship. We demonstrated the validity of the F radical density estimation in the CF4 and CF4/O2 plasmas by mass spectrometry using the proposed method. [ABSTRACT FROM AUTHOR] |
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