Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies.
| Title: | Epitaxial Ge-on-Nothing and Epitaxial Ge on Si-on-Nothing as Virtual Substrates for 3D Device Stacking Technologies. |
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| Authors: | Loo, R., Porret, C., Han, H., Srinivasan, A., Vecchio, E., Depauw, V. |
| Source: | ECS Journal of Solid State Science & Technology; Aug2021, Vol. 10 Issue 8, p217-223, 7p |
| Database: | Complementary Index |
| ISSN: | 21628769 |
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| DOI: | 10.1149/2162-8777/ac1a0b |
| Published in: | ECS Journal of Solid State Science & Technology |
| Language: | English |