Range statistics and Rutherford backscattering studies on Fe-implanted In0.53Ga0.47As.
| Title: | Range statistics and Rutherford backscattering studies on Fe-implanted In0.53Ga0.47As. |
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| Authors: | Gulwadi, Sadanand M., Rao, Mulpuri V., Simons, David S. |
| Source: | Journal of Applied Physics; January 1 1991, Vol. 69, p162-167, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.347738 |
| Published in: | Journal of Applied Physics |
| Language: | English |