Academic Journal
View in EDS

Semiconducting wafer form shaping with an electric discharge machine.

Bibliographic Details
Title: Semiconducting wafer form shaping with an electric discharge machine.
Authors: Yang, Yu-Tung
Source: Review of Scientific Instruments; September 1988, Vol. 59, p2094-2096, 3p
Database: Applied Science & Technology Source
More Details
ISSN:00346748
DOI:10.1063/1.1140035
Published in:Review of Scientific Instruments
Language:English