Optical, structural and electrical characteristics of aluminum oxynitride thin films deposited in an Ar-N gas mixture RF-sputtering system.
| Title: | Optical, structural and electrical characteristics of aluminum oxynitride thin films deposited in an Ar-N gas mixture RF-sputtering system. |
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| Authors: | Araiza, J. J., Aguilar-Frutis, M., Falcony, C. |
| Source: | Journal of Materials Science: Materials in Electronics; October 2005, Vol. 16 Issue 10, p657-661, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-005-3741-y |
| Published in: | Journal of Materials Science: Materials in Electronics |
| Language: | English |