Gas temperature gradients in a CF4 inductive discharge.
Title: | Gas temperature gradients in a CF4 inductive discharge. |
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Authors: | Abada, Hana, Chabert, Pascal, Booth, Jean Paul |
Source: | Journal of Applied Physics; October 15 2002, Vol. 92 Issue 8, p4223-4230, 8p |
Database: | Applied Science & Technology Source |
ISSN: | 00218979 |
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DOI: | 10.1063/1.1505683 |
Published in: | Journal of Applied Physics |
Language: | English |