The Electrical Characteristics of 4H-SiC Schottky Diodes after Inductively Coupled Plasma Etching.
| Title: | The Electrical Characteristics of 4H-SiC Schottky Diodes after Inductively Coupled Plasma Etching. |
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| Authors: | Plank, N. O. V., Jiang, Liudi, Gundlach, A. M. |
| Source: | Journal of Electronic Materials; September 2003, Vol. 32 Issue 9, p964-971, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-003-0231-y |
| Published in: | Journal of Electronic Materials |
| Language: | English |